Electrical conductivity of nanocomposite FexOy(Fe)/SiO2(Si) films

DOI: 10.62564/M4-OP2159

Olha Pylypova¹, Oleh Bratus’², Anatoliy Kizjak², Serhii Antonin², Yaroslav Muryi¹, Anatoliy Evtukh<sup>2,1

1</sup>Institute of High Technologies, Taras Shevchenko National University of Kyiv, Ukraine
²V. Lashkaryov Institute of Semiconductor Physics of National Academy of Science of Ukraine


Nowadays the synthesis and investigation of the materials, containing metal and semiconductor nanoparticles in amorphous matrix are of the great interest for the material engineering and also various applications. Particular attention is given to the nanocomposites in which nanosized particles of soft ferromagnetic alloys are randomly distributed in dielectric matrix [1]. The investigation of electrical conductivity and its dependence on the technological processes is еру necessary condition for many applications. The nanocomposite FexOy(Fe)/SiOx films were deposited by Ion Plasma Sputtering (IPS) technique at sputtering of combined silicon-iron target in O2+Ar ambient at 150 °C on Si substrates. Among the varying parameters of deposition process were ratio of Fe and Si parts of target, content O2 in gas mixture, and film thickness. In the second stage, FexOy(Fe)/SiOx films were annealed in the argon atmosphere at the temperature of 1100 °C during 60 min to form nanocomposites. Current-voltage characteristics of MIS structures containing FexOy(Fe)/SiO2(Si) films were measured in the temperature range of 95–340 K using the Source Meter 2410 Keithley. As a result of the study of the electrical characteristics of nanocomposite films on direct current, it was established main pequliarities of electron thatsport through the nanocomposite FexOy(Fe)/SiO2(Si) films.For all films under investigation the current for non-annealed films is smaller than for annealed ones in the region of the applied electric fields E < 2.0×106 V/cm, but the ratio becomes the opposite with the increase of the applied fields higher E > 2.0×106 V/cm.Some electron transport mechanisms are realized in dependence on the applied electric field, namely: quadratic current-voltage dependence, the Child-Langmuir law, space charge limited current with shallow traps in bandgap, Poole-Frenkel and Fowler-Nordheim mechanisms.

Keywords
nanocomposites Current-voltage characteristi Ion Plasma Sputteringcs

Acknowledgments
This research was supported by the project “Development of nanocomposite material technology for highly efficient absorption of electromagnetic radiation” of the National Research Foundation of Ukraine (No. 2022.01/0066).

References
[1] Kizjak, A. Y., Evtukh, A. A., Bratus, O. L., Antonin, S. V., Ievtukh, V. A., Pylypova, O. V., and Fedotov, A. K. (2022). Electron transport through composite SiO2 (Si) and FexOy (Fe) thin films containing Si and Fe nanoclusters. Journal of Alloys and Compounds, 903, 163892.