CVD synthesis and morphology of TiN fibers and films

DOI: 10.62564/M4-OP1418

Peter Sylenko, Oleksii Pokropyvnyi, Denis Andrushchenko, Mykola Yakubiv, Igor Okun, Yuriy Solonin

Frantsevich Institute for Problems of Materials Science National Academy of Science of Ukraine


TiN, due to its excellent properties, is widly used industry, for example, in the manufacture of cutting tools, for the reinforcement of ceramic, metal and polymer matrices, for the creation of electronic devices, in particular, for obtaining solar energy, energy storage, photocatalysis, as well as as biomedical implants and protective wear-resistant coatings [1]. One of the promising directions of materials science is the creation of fibrous composite materials with ceramic, metal and polymer matrices. For this, continuous, micro- and nanofibers of refractory compounds, such as SiC, Si3N4, BN, TiC, TiN, etc., are mainly used [2,3]. In this work, the peculiarities of the processes of synthesis of films, micro- and nanofibers of TiN by the method of chemical vapor deposition (CVD) are considered. The research was done using titanium tetrachloride (TiCl4) in a mixture of nitrogen and hydrogen gases in a wide temperature range, namely 700-1300 °C. Silicon, steel 3 and titanium plates and Al, Sn, Pb, Ni powders were used as substrates. Study of synthesis products by scanning and transmission electron microscopy. With the above synthesis parameters, coatings were obtained in the form of fibers, films with a regular and island structure, namely in the form of plates, needles and stars. It was proved that depending on the material and temperature of the substrates, TiN films or crystals of different shapes and agglomeration were formed on the refractory or molten surface. During deposition at low temperatures (700-900 °C), films without filamentous crystals were observed. The morphology of these films was with microcracks. At temperatures of 1000-1150 °C, the new morphological structures were lamellar, needle-like, and star-shaped crystals. Micro- and nanofibers were formed at temperatures of 1150-1300 °C. A new way of forming star-shaped crystals is proposed by the method of quantum-chemical modeling [4].

Keywords
CVD, TiN, fibers, films, modeling

Acknowledgments
Not provided

References
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