Properties of Multilayer Nitride Coatings Based on Chromium and Niobium

DOI: 10.62564/M4-IS1818

Iryna Serdiuk¹, Viacheslav Stolbovyi^1,2, Ruslan Kryvoshapka¹, Anatoliy Andreev¹, Sergiy Petrushenko^3,4, Mateusz Fijalkowski<sup>4

1</sup>National Science Center "Kharkiv Institute of Physics and Technology", Ukraine
²Kharkiv National Automobile and Highway University, Ukraine
³V. N. Karazin Kharkiv National University, Ukraine
⁴Technical University of Liberec, Czech Republic


In recent years, the development of coatings for different applications is based on the combination of coating components with different physical, mechanical, electrical, optical properties and the complication of the coating structure (1-3). One of important factors affecting the functional properties of multilayer coatings is the state of the interphase boundary between layers with the different phase composition and structural state. This becomes especially significant when the thickness of layers is reduced to tens of nm. Nitride multilayer coatings based on chromium and niobium were deposited in a modified installation “BULAT-6” (4). AISI 430 stainless steel samples were used as substrates for deposition of coatings. Three series of coatings were obtained. Planar raster electron microscopic images were obtained using a Tescan Vega 3 SBU. Cross sections were examined in a field emission scanning electron microscope (Zeiss ULTRA Plus). Investigation of multilayer nitride СrN/NbN coatings, which were obtained under different technological parameters of deposition (constant negative voltage on the substrate is from −70 to −200 V, nitrogen pressure in the vacuum chamber is from 0.08 to 0.27 Pa, the total number of layers N (68, 270, 1080), the bilayer period is from 6.7 to 230 nm) made it possible to expand the understanding of the technological parameters’ influence on properties of obtained coatings. Cross-sections analysis of multilayer nitride CrN/NbN coatings of three series with different number of layers and bilayer period showed that the total thickness of coatings was 3.6 µm for coatings of the first series, which were obtained by continuous rotation of the substrate holder, and about 8 and 9 µm for coatings of the second and third series, respectively. Elemental analysis showed that obtained coatings of series II and III have high planarity of layers and practically no droplet phase in the volume of multilayer nitride CrN/NbN coatings.

Keywords
multilayer coating, structure, microhardness, vacuum arc, properties

Acknowledgments
Not provided

References
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